Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11773479 | Plasma erosion resistant thin film coating for high temperature application | Biraja P. Kanungo, Jennifer Y. Sun, Martin Jeff Salinas, Jared Ahmad Lee | 2023-10-03 |
| 11724353 | Chamber components with polished internal apertures | Jennifer Y. Sun, David Koonce, Biraja P. Kanungo | 2023-08-15 |
| 11680308 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho | 2023-06-20 |
| 11661650 | Yttrium oxide based coating composition | Christopher Laurent Beaudry, Hyun-Ho Doh, Joseph Behnke, Joseph F. Sommers | 2023-05-30 |
| 11566317 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566319 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566318 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |