| 11782404 |
Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls |
Dean C. Hruzek |
2023-10-10 |
| D992611 |
Mainframe of substrate processing system |
Michael Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir |
2023-07-18 |
| D991994 |
Mainframe of substrate processing system |
Michael Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir |
2023-07-11 |
| 11667575 |
Erosion resistant metal oxide coatings |
Xiaowei Wu, Jennifer Y. Sun |
2023-06-06 |
| 11640917 |
Ground electrode formed in an electrostatic chuck for a plasma processing chamber |
Vijay D. Parkhe |
2023-05-02 |
| 11631605 |
Sealed substrate carriers and systems and methods for transporting substrates |
Jeffrey C. Hudgens |
2023-04-18 |
| 11621182 |
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing |
Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Jeffrey A. Brodine |
2023-04-04 |
| 11583816 |
Gas distribution plate for thermal deposition |
Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Dhritiman Subha Kashyap |
2023-02-21 |
| 11581203 |
Systems for integrating load locks into a factory interface footprint space |
Jacob Newman, Andrew J. Constant, Paul B. Reuter, Shay Assaf, Sushant S. Koshti |
2023-02-14 |
| 11576264 |
Electronic device manufacturing system |
Jeffrey C. Hudgens |
2023-02-07 |
