Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850742 | Dual robot including splayed end effectors and systems and methods including same | Karuppasamy Muthukamatchi, Damon K. Cox | 2023-12-26 |
| 11842917 | Process kit ring adaptor | Leon Volfovski, Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan +3 more | 2023-12-12 |
| 11784074 | Substrate transfer systems and methods of use thereof | Alex Berger, Eric A. Englhardt | 2023-10-10 |
| 11770049 | Generating electric power for a robotic end effector | Alexander Berger, Paul Lawrence Korff, William P. Laceky, Rajkumar Thanu, Damon K. Cox +1 more | 2023-09-26 |
| 11631605 | Sealed substrate carriers and systems and methods for transporting substrates | Michael R. Rice | 2023-04-18 |
| 11600580 | Replaceable end effector contact pads, end effectors, and maintenance methods | Whitney B. Kroetz, Damon K. Cox, Leon Volfovski, Balamurali Murugaraj | 2023-03-07 |
| 11576264 | Electronic device manufacturing system | Michael R. Rice | 2023-02-07 |
| 11565402 | Substrate transfer devices, systems and methods of use thereof | Alexander Berger | 2023-01-31 |
| 11555250 | Organic contamination free surface machining | Yuanhong Guo, Sheng Guo, Marek Radko, Steven V. Sansoni, Nagendra Madiwal +7 more | 2023-01-17 |