Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842917 | Process kit ring adaptor | Leon Volfovski, Andreas Schmid, Nicholas Michael Kopec, Steven E. Babayan, Douglas R. McAllister +3 more | 2023-12-12 |
| 11668553 | Apparatus and method for controlling edge ring variation | Sathyendra Ghantasala, Leonid Dorf, Evgeny Kamenetskiy, Peter Muraoka, Rajinder Dhindsa +1 more | 2023-06-06 |