Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11818810 | Heater assembly with purge gap control and temperature uniformity for batch processing chambers | Amit Rajendra Sherekar, Kartik Shah, Ashutosh Agarwal, Eric J. Hoffmann, Sanjeev Baluja +1 more | 2023-11-14 |
| 11769684 | Wafer heater with backside and integrated bevel purge | Tejas Ulavi, Vijay D. Parkhe, Naveen Kumar Nagaraja, Sanjeev Baluja, Surajit Kumar +1 more | 2023-09-26 |
| 11682576 | Pedestal heater for spatial multi-wafer processing tool | Tejas Ulavi, Sanjeev Baluja | 2023-06-20 |
| 11586789 | Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity | Chaowei Wang, Kartik Shah, Kevin Griffin, Karthik Ramanathan, Hanhong Chen +2 more | 2023-02-21 |
| 11583816 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Michael R. Rice | 2023-02-21 |
| 11584993 | Thermally uniform deposition station | Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Kenneth Brian Doering, Kartik Shah | 2023-02-21 |
| 11549183 | Showerhead with inlet mixer | Ashutosh Agarwal, Sanjeev Baluja, Kartik Shah, Yanjun Xia | 2023-01-10 |