Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791190 | Apparatus and methods for real-time wafer chucking detection | Arkaprava Dan, Mike Murtagh, Sanjeev Baluja | 2023-10-17 |
| 11769684 | Wafer heater with backside and integrated bevel purge | Vijay D. Parkhe, Naveen Kumar Nagaraja, Sanjeev Baluja, Surajit Kumar, Dhritiman Subha Kashyap +1 more | 2023-09-26 |
| 11682576 | Pedestal heater for spatial multi-wafer processing tool | Sanjeev Baluja, Dhritiman Subha Kashyap | 2023-06-20 |
| 11623253 | In-situ DC plasma for cleaning pedestal heater | Arkaprava Dan, Sanjeev Baluja, Wei V. Tang | 2023-04-11 |
| 11602064 | Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers | Akshay Gunaji, Uday Pai, Timothy J. Roggenbuck, Sanjeev Baluja, Kalesh Panchaxari Karadi | 2023-03-07 |