Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791190 | Apparatus and methods for real-time wafer chucking detection | Tejas Ulavi, Arkaprava Dan, Sanjeev Baluja | 2023-10-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791190 | Apparatus and methods for real-time wafer chucking detection | Tejas Ulavi, Arkaprava Dan, Sanjeev Baluja | 2023-10-17 |