Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769684 | Wafer heater with backside and integrated bevel purge | Tejas Ulavi, Vijay D. Parkhe, Naveen Kumar Nagaraja, Sanjeev Baluja, Dhritiman Subha Kashyap +1 more | 2023-09-26 |
| 11577358 | Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing | Hui Chen, Chih Chung Chou, Shou-Sung Chang | 2023-02-14 |