| 11833637 |
Control of steam generation for chemical mechanical polishing |
Hari Soundararajan, Calvin Spencer Lee, Jonathan P. Domin, Shuchivrat Datar, Dmitry Sklyar +3 more |
2023-12-05 |
| 11826872 |
Temperature and slurry flow rate control in CMP |
Haosheng Wu, Jianshe Tang, Brian J. Brown, Shih-Haur Shen, Hari Soundararajan |
2023-11-28 |
| 11819976 |
Spray system for slurry reduction during chemical mechanical polishing (cmp) |
Chih Chung Chou, Anand N. Iyer, Ekaterina A. Mikhaylichenko, Christopher Heung-Gyun Lee, Erik S. Rondum +1 more |
2023-11-21 |
| 11806835 |
Slurry distribution device for chemical mechanical polishing |
Yen-Chu Yang, Stephen Jew, Jianshe Tang, Haosheng Wu, Paul D. Butterfield +2 more |
2023-11-07 |
| 11780046 |
Polishing system with annular platen or polishing pad |
Paul D. Butterfield, Thomas H. Osterheld, Jeonghoon Oh, Steven M. Zuniga, Fred C. Redeker |
2023-10-10 |
| 11752589 |
Chemical mechanical polishing temperature scanning apparatus for temperature control |
Hari Soundararajan, Haosheng Wu, Jianshe Tang |
2023-09-12 |
| 11728185 |
Steam-assisted single substrate cleaning process and apparatus |
Jianshe Tang, Wei Lu, Haosheng Wu, Taketo Sekine, Hari Soundararajan +1 more |
2023-08-15 |
| 11697187 |
Temperature-based assymetry correction during CMP and nozzle for media dispensing |
Haosheng Wu, Jianshe Tang, Chih Chung, Hui Chen, Hari Soundararajan +1 more |
2023-07-11 |
| 11633833 |
Use of steam for pre-heating of CMP components |
Haosheng Wu, Jianshe Tang, Hari Soundararajan, Paul D. Butterfield, Hui Chen +2 more |
2023-04-25 |
| 11628478 |
Steam cleaning of CMP components |
Haosheng Wu, Jianshe Tang, Hari Soundararajan, Hui Chen, Chih Chung Chou +2 more |
2023-04-18 |
| 11597052 |
Temperature control of chemical mechanical polishing |
Hari Soundararajan, Haosheng Wu, Jianshe Tang, Jeonghoon Oh, Rajeev Bajaj +1 more |
2023-03-07 |
| 11577358 |
Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing |
Surajit Kumar, Hui Chen, Chih Chung Chou |
2023-02-14 |
