Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11819976 | Spray system for slurry reduction during chemical mechanical polishing (cmp) | Chih Chung Chou, Anand N. Iyer, Christopher Heung-Gyun Lee, Erik S. Rondum, Tiffany Yu-Nung Cheung +1 more | 2023-11-21 |
| 11764069 | Asymmetry correction via variable relative velocity of a wafer | Jimin Zhang, Brian J. Brown, Eric Lau, Jeonghoon Oh, Gerald Alonzo | 2023-09-19 |
| 11721563 | Non-contact clean module | Jagan Rangarajan, Adrian Blank, Edward Golubovsky, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga +2 more | 2023-08-08 |
| 11682567 | Cleaning system with in-line SPM processing | Brian J. Brown, Brian K. Kirkpatrick | 2023-06-20 |