Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749552 | Wafer processing tools and methods thereof | Jagan Rangarajan, Shaun Van Der Veen, Justin Ho Kuen Wong, Steven M. Zuniga | 2023-09-05 |
| 11721563 | Non-contact clean module | Jagan Rangarajan, Adrian Blank, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga, Ekaterina A. Mikhaylichenko +2 more | 2023-08-08 |