Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749552 | Wafer processing tools and methods thereof | Jagan Rangarajan, Edward Golubovsky, Shaun Van Der Veen, Steven M. Zuniga | 2023-09-05 |
| 11724355 | Substrate polish edge uniformity control with secondary fluid dispense | Kevin Song | 2023-08-15 |