Issued Patents 2023
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850703 | Method of forming retaining ring with shaped surface | Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2023-12-26 |
| 11780049 | Polishing carrier head with multiple angular pressurizable zones | Jay Gurusamy, Andrew J. Nagengast, Vladimir Galburt | 2023-10-10 |
| 11780046 | Polishing system with annular platen or polishing pad | Paul D. Butterfield, Thomas H. Osterheld, Jeonghoon Oh, Shou-Sung Chang, Fred C. Redeker | 2023-10-10 |
| 11759911 | Carrier head with segmented substrate chuck | Jay Gurusamy | 2023-09-19 |
| 11745227 | Substrate cleaning devices and methods thereof | Jay Gurusamy, Jagan Rangarajan | 2023-09-05 |
| 11749552 | Wafer processing tools and methods thereof | Jagan Rangarajan, Edward Golubovsky, Shaun Van Der Veen, Justin Ho Kuen Wong | 2023-09-05 |
| 11724357 | Pivotable substrate retaining ring | Jay Gurusamy, Andrew J. Nagengast | 2023-08-15 |
| 11721563 | Non-contact clean module | Jagan Rangarajan, Adrian Blank, Edward Golubovsky, Balasubramaniam Coimbatore Jaganathan, Ekaterina A. Mikhaylichenko +2 more | 2023-08-08 |
| 11717936 | Methods for a web-based CMP system | Dmitry Sklyar, Jeonghoon Oh, Gerald Alonzo, Jonathan P. Domin, Jay Gurusamy | 2023-08-08 |
| 11682561 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2023-06-20 |
| 11660721 | Dual loading retaining ring | Andrew J. Nagengast | 2023-05-30 |
| 11623321 | Polishing head retaining ring tilting moment control | Andrew J. Nagengast, Jay Gurusamy | 2023-04-11 |
| 11577361 | Retaining ring with shaped surface and method of forming | Hung Chih Chen, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2023-02-14 |