Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11780049 | Polishing carrier head with multiple angular pressurizable zones | Steven M. Zuniga, Jay Gurusamy, Vladimir Galburt | 2023-10-10 |
| 11724357 | Pivotable substrate retaining ring | Steven M. Zuniga, Jay Gurusamy | 2023-08-15 |
| 11682561 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Steven M. Zuniga, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2023-06-20 |
| 11673226 | Retaining ring for CMP | Christopher Heung-Gyun Lee, Thomas Li, Anand N. Iyer, Jie Diao, Huanbo Zhang +3 more | 2023-06-13 |
| 11660721 | Dual loading retaining ring | Steven M. Zuniga | 2023-05-30 |
| 11623321 | Polishing head retaining ring tilting moment control | Steven M. Zuniga, Jay Gurusamy | 2023-04-11 |