Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710228 | Detecting an excursion of a CMP component using time-based sequence of images and machine learning | Sidney P. Huey, Benjamin Cherian | 2023-07-25 |
| 11673226 | Retaining ring for CMP | Andrew J. Nagengast, Christopher Heung-Gyun Lee, Anand N. Iyer, Jie Diao, Huanbo Zhang +3 more | 2023-06-13 |