Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850703 | Method of forming retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2023-12-26 |
| 11710228 | Detecting an excursion of a CMP component using time-based sequence of images and machine learning | Thomas Li, Benjamin Cherian | 2023-07-25 |
| 11577361 | Retaining ring with shaped surface and method of forming | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2023-02-14 |