Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11780049 | Polishing carrier head with multiple angular pressurizable zones | Steven M. Zuniga, Andrew J. Nagengast, Vladimir Galburt | 2023-10-10 |
| 11759911 | Carrier head with segmented substrate chuck | Steven M. Zuniga | 2023-09-19 |
| 11745227 | Substrate cleaning devices and methods thereof | Steven M. Zuniga, Jagan Rangarajan | 2023-09-05 |
| 11724357 | Pivotable substrate retaining ring | Steven M. Zuniga, Andrew J. Nagengast | 2023-08-15 |
| 11717936 | Methods for a web-based CMP system | Dmitry Sklyar, Jeonghoon Oh, Gerald Alonzo, Jonathan P. Domin, Steven M. Zuniga | 2023-08-08 |
| 11623320 | Polishing head with membrane position control | Steven M. Zungia | 2023-04-11 |
| 11623321 | Polishing head retaining ring tilting moment control | Andrew J. Nagengast, Steven M. Zuniga | 2023-04-11 |