Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721563 | Non-contact clean module | Jagan Rangarajan, Adrian Blank, Edward Golubovsky, Steven M. Zuniga, Ekaterina A. Mikhaylichenko +2 more | 2023-08-08 |
| 11705354 | Substrate handling systems | Gee Sun Hoey, Jagan Rangarajan | 2023-07-18 |