Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11819976 | Spray system for slurry reduction during chemical mechanical polishing (cmp) | Anand N. Iyer, Ekaterina A. Mikhaylichenko, Christopher Heung-Gyun Lee, Erik S. Rondum, Tiffany Yu-Nung Cheung +1 more | 2023-11-21 |
| 11701749 | Monitoring of vibrations during chemical mechanical polishing | Boguslaw A. Swedek, Dominic J. Benvegnu, Nicholas A. Wiswell, Thomas H. Osterheld, Jeonghoon Oh | 2023-07-18 |
| 11699915 | Controller and battery management methods | Yingguo Zhang, Guoyan Qiao, Fu-Jen Hsieh, Chia-Ming Chang, Hua-Yi Wang | 2023-07-11 |
| 11660722 | Polishing system with capacitive shear sensor | Nicholas A. Wiswell, Dominic J. Benvegnu | 2023-05-30 |
| 11633833 | Use of steam for pre-heating of CMP components | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Paul D. Butterfield +2 more | 2023-04-25 |
| 11628478 | Steam cleaning of CMP components | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Hui Chen +2 more | 2023-04-18 |
| 11577358 | Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing | Surajit Kumar, Hui Chen, Shou-Sung Chang | 2023-02-14 |