Issued Patents 2023
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11833637 | Control of steam generation for chemical mechanical polishing | Shou-Sung Chang, Calvin Spencer Lee, Jonathan P. Domin, Shuchivrat Datar, Dmitry Sklyar +3 more | 2023-12-05 |
| 11826872 | Temperature and slurry flow rate control in CMP | Haosheng Wu, Jianshe Tang, Brian J. Brown, Shih-Haur Shen, Shou-Sung Chang | 2023-11-28 |
| 11752589 | Chemical mechanical polishing temperature scanning apparatus for temperature control | Shou-Sung Chang, Haosheng Wu, Jianshe Tang | 2023-09-12 |
| 11728185 | Steam-assisted single substrate cleaning process and apparatus | Jianshe Tang, Wei Lu, Haosheng Wu, Taketo Sekine, Shou-Sung Chang +1 more | 2023-08-15 |
| 11697187 | Temperature-based assymetry correction during CMP and nozzle for media dispensing | Haosheng Wu, Shou-Sung Chang, Jianshe Tang, Chih Chung, Hui Chen +1 more | 2023-07-11 |
| 11633833 | Use of steam for pre-heating of CMP components | Haosheng Wu, Jianshe Tang, Shou-Sung Chang, Paul D. Butterfield, Hui Chen +2 more | 2023-04-25 |
| 11628478 | Steam cleaning of CMP components | Haosheng Wu, Jianshe Tang, Shou-Sung Chang, Hui Chen, Chih Chung Chou +2 more | 2023-04-18 |
| 11597052 | Temperature control of chemical mechanical polishing | Shou-Sung Chang, Haosheng Wu, Jianshe Tang, Jeonghoon Oh, Rajeev Bajaj +1 more | 2023-03-07 |