Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11826872 | Temperature and slurry flow rate control in CMP | Haosheng Wu, Jianshe Tang, Brian J. Brown, Shou-Sung Chang, Hari Soundararajan | 2023-11-28 |
| 11638982 | Core configuration for in-situ electromagnetic induction monitoring system | Hassan G. Iravani, Kun Xu, Denis Ivanov, Boguslaw A. Swedek | 2023-05-02 |