Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11826872 | Temperature and slurry flow rate control in CMP | Haosheng Wu, Jianshe Tang, Shih-Haur Shen, Shou-Sung Chang, Hari Soundararajan | 2023-11-28 |
| 11823916 | Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning | Wei Lu, Jimin Zhang, Jianshe Tang | 2023-11-21 |
| 11764069 | Asymmetry correction via variable relative velocity of a wafer | Jimin Zhang, Eric Lau, Ekaterina A. Mikhaylichenko, Jeonghoon Oh, Gerald Alonzo | 2023-09-19 |
| 11682567 | Cleaning system with in-line SPM processing | Ekaterina A. Mikhaylichenko, Brian K. Kirkpatrick | 2023-06-20 |