Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823916 | Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning | Jimin Zhang, Jianshe Tang, Brian J. Brown | 2023-11-21 |
| 11780045 | Compensation for substrate doping for in-situ electromagnetic inductive monitoring | David Maxwell Gage, Harry Q. Lee, Kun Xu, Jimin Zhang | 2023-10-10 |
| 11728185 | Steam-assisted single substrate cleaning process and apparatus | Jianshe Tang, Haosheng Wu, Taketo Sekine, Shou-Sung Chang, Hari Soundararajan +1 more | 2023-08-15 |