Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11823916 | Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning | Jimin Zhang, Jianshe Tang, Brian J. Brown | 2023-11-21 | $39,416,000 |
| 11780045 | Compensation for substrate doping for in-situ electromagnetic inductive monitoring | David Maxwell Gage, Harry Q. Lee, Kun Xu, Jimin Zhang | 2023-10-10 | $39,034,000 |
| 11728185 | Steam-assisted single substrate cleaning process and apparatus | Jianshe Tang, Haosheng Wu, Taketo Sekine, Shou-Sung Chang, Hari Soundararajan +1 more | 2023-08-15 | $42,730,000 |