Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850699 | Switching control algorithms on detection of exposure of underlying layer during polishing | Kun Xu, Benjamin Cherian, David Maxwell Gage | 2023-12-26 |
| 11791224 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian +1 more | 2023-10-17 |
| 11780045 | Compensation for substrate doping for in-situ electromagnetic inductive monitoring | Wei Lu, David Maxwell Gage, Kun Xu, Jimin Zhang | 2023-10-10 |
| 11658078 | Using a trained neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian +1 more | 2023-05-23 |