| 11850699 |
Switching control algorithms on detection of exposure of underlying layer during polishing |
Kun Xu, Harry Q. Lee, Benjamin Cherian |
2023-12-26 |
| 11787008 |
Chemical mechanical polishing with applied magnetic field |
Xingfeng Wang, Jianshe Tang, Feng Q. Liu, Stephen Jew |
2023-10-17 |
| 11791224 |
Technique for training neural network for use in in-situ monitoring during polishing and polishing system |
Kun Xu, Kiran Shrestha, Doyle E. Bennett, Benjamin Cherian, Jun Qian +1 more |
2023-10-17 |
| 11780045 |
Compensation for substrate doping for in-situ electromagnetic inductive monitoring |
Wei Lu, Harry Q. Lee, Kun Xu, Jimin Zhang |
2023-10-10 |
| 11658078 |
Using a trained neural network for use in in-situ monitoring during polishing and polishing system |
Kun Xu, Kiran Shrestha, Doyle E. Bennett, Benjamin Cherian, Jun Qian +1 more |
2023-05-23 |
