Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791224 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2023-10-17 |
| 11658078 | Using a trained neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2023-05-23 |