Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11847776 | System using film thickness estimation from machine learning based processing of substrate images | Sivakumar Dhandapani, Arash Alahgholipouromrani, Dominic J. Benvegnu, Jun Qian | 2023-12-19 |
| 11836913 | Film thickness estimation from machine learning based processing of substrate images | Sivakumar Dhandapani, Arash Alahgholipouromrani, Dominic J. Benvegnu, Jun Qian | 2023-12-05 |
| 11791224 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2023-10-17 |
| 11780047 | Determination of substrate layer thickness with polishing pad wear compensation | Kun Xu, Benjamin Cherian, Jun Qian | 2023-10-10 |
| 11695054 | Methods for forming a semiconductor device structure and related semiconductor device structures | Chiyu Zhu, Petri Raisanen, Michael Eugene Givens | 2023-07-04 |
| 11658078 | Using a trained neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2023-05-23 |
| 11581220 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Shankar Swaminathan, Chiyu Zhu, Henri Jussila, Qi Xie | 2023-02-14 |