Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827978 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Shankar Swaminathan, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni | 2023-11-28 |
| 11581220 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Kiran Shrestha, Shankar Swaminathan, Chiyu Zhu, Henri Jussila, Qi Xie | 2023-02-14 |