Issued Patents 2023
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854876 | Systems and methods for cobalt metalization | Shinya Iwashita, Jan Willem Maes, Jiyeon Kim | 2023-12-26 |
| 11749562 | Selective deposition method to form air gaps | — | 2023-09-05 |
| 11739427 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2023-08-29 |
| 11739428 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2023-08-29 |
| 11695054 | Methods for forming a semiconductor device structure and related semiconductor device structures | Kiran Shrestha, Petri Raisanen, Michael Eugene Givens | 2023-07-04 |
| 11658030 | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures | Tom E. Blomberg | 2023-05-23 |
| 11640899 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2023-05-02 |
| 11581220 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Kiran Shrestha, Shankar Swaminathan, Henri Jussila, Qi Xie | 2023-02-14 |