Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823976 | Fluorine-containing conductive films | Linda Lindroos, Hannu Huotari | 2023-11-21 |
| 11739427 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2023-08-29 |
| 11739428 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2023-08-29 |
| 11658030 | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures | Chiyu Zhu | 2023-05-23 |
| 11640899 | Atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2023-05-02 |
| 11549177 | Process for passivating dielectric films | Eva Tois, Robert Huggare, Jan Willem Maes, Vladimir Machkaoutsan, Dieter Pierreux | 2023-01-10 |