Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776807 | Plasma enhanced deposition processes for controlled formation of oxygen containing thin films | Lingyun Jia, Viljami Pore, Sun Ja Kim, Oreste Madia | 2023-10-03 |
| 11739427 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2023-08-29 |
| 11739428 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2023-08-29 |
| 11654454 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2023-05-23 |
| 11643726 | Methods for forming a layer comprising a condensing and a curing step | Viljami Pore | 2023-05-09 |
| 11643720 | Selective deposition of silicon oxide on metal surfaces | Andrea Illiberi, Giuseppe Alessio Verni, Shaoren Deng, Daniele Chiappe, Eva Tois +1 more | 2023-05-09 |
| 11640899 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2023-05-02 |