Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776807 | Plasma enhanced deposition processes for controlled formation of oxygen containing thin films | Lingyun Jia, Viljami Pore, Marko Tuominen, Sun Ja Kim | 2023-10-03 |
| 11728164 | Selective PEALD of oxide on dielectric | Eva Tois, Viljami Pore, Suvi Haukka, Toshiya Suzuki, Lingyun Jia +1 more | 2023-08-15 |
| 11664219 | Selective deposition of SiOC thin films | Jan Willem Maes, David Kurt de Roest | 2023-05-30 |
| 11664222 | Atomic layer deposition of indium gallium zinc oxide | Andrea Illiberi, Michael Eugene Givens, Tatiana Ivanova, Charles Dezelah, Varun Sharma | 2023-05-30 |