Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851755 | Sequential infiltration synthesis apparatus and a method of forming a patterned structure | Jan Willem Maes, Werner Knaepen, Krzysztof Kamil Kachel, Bert Jongbloed, Dieter Pierreux | 2023-12-26 |
| 11735422 | Method of forming a photoresist underlayer and structure including same | Ivan Zyulkov, Yoann Tomczak, Michael Eugene Givens, Perttu Sippola, Tatiana Ivanova +3 more | 2023-08-22 |
| 11664219 | Selective deposition of SiOC thin films | Jan Willem Maes, Oreste Madia | 2023-05-30 |
| 11644758 | Structures and methods for use in photolithography | Daniele Piumi | 2023-05-09 |