Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769664 | Methods for depositing a hafnium lanthanum oxide film on a substrate by a cyclical deposition process in a reaction chamber | Tatiana Ivanova, Michael Eugene Givens | 2023-09-26 |
| 11735422 | Method of forming a photoresist underlayer and structure including same | Ivan Zyulkov, David Kurt de Roest, Yoann Tomczak, Michael Eugene Givens, Tatiana Ivanova +3 more | 2023-08-22 |