Issued Patents 2023
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830732 | Selective passivation and selective deposition | Jan Willem Maes, Michael Eugene Givens, Suvi Haukka, Vamsi K. Paruchuri, Ivo Raaijmakers +4 more | 2023-11-28 |
| 11814400 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2023-11-14 |
| 11804373 | Selective layer formation using deposition and removing | Eva Tois | 2023-10-31 |
| 11798834 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface | Zecheng Liu | 2023-10-24 |
| 11784043 | Formation of SiN thin films | Toshiya Suzuki, Shang Chen, Ryoko Yamada, Dai Ishikawa, Kunitoshi Namba | 2023-10-10 |
| 11776807 | Plasma enhanced deposition processes for controlled formation of oxygen containing thin films | Lingyun Jia, Marko Tuominen, Sun Ja Kim, Oreste Madia | 2023-10-03 |
| 11728164 | Selective PEALD of oxide on dielectric | Eva Tois, Suvi Haukka, Toshiya Suzuki, Lingyun Jia, Sun Ja Kim +1 more | 2023-08-15 |
| 11728175 | Deposition of organic films | Eva Tois, Hidemi Suemori, Suvi Haukka, Varun Sharma, Jan Willem Maes +2 more | 2023-08-15 |
| 11694892 | Method and apparatus for filling a gap | Werner Knaepen, Bert Jongbloed, Dieter Pierreux, Gido Van Der Star, Toshiya Suzuki | 2023-07-04 |
| 11654454 | Vapor phase deposition of organic films | Marko Tuominen, Hannu Huotari | 2023-05-23 |
| 11643726 | Methods for forming a layer comprising a condensing and a curing step | Marko Tuominen | 2023-05-09 |
| 11615980 | Method and apparatus for filling a recess formed within a substrate surface | Zecheng Liu | 2023-03-28 |
| 11610775 | Method and apparatus for filling a gap | Werner Knaepen, Bert Jongbloed, Dieter Pierreux, Steven R. A. Van Aerde, Suvi Haukka +2 more | 2023-03-21 |
| 11587783 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Shang Chen, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2023-02-21 |
| 11562900 | Formation of SiOC thin films | Toshiya Suzuki, Hannu Huotari | 2023-01-24 |
| 11542600 | Synthesis and use of precursors for ALD of group VA element containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2023-01-03 |