Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776807 | Plasma enhanced deposition processes for controlled formation of oxygen containing thin films | Viljami Pore, Marko Tuominen, Sun Ja Kim, Oreste Madia | 2023-10-03 |
| 11728164 | Selective PEALD of oxide on dielectric | Eva Tois, Viljami Pore, Suvi Haukka, Toshiya Suzuki, Sun Ja Kim +1 more | 2023-08-15 |