Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784043 | Formation of SiN thin films | Toshiya Suzuki, Viljami Pore, Ryoko Yamada, Dai Ishikawa, Kunitoshi Namba | 2023-10-10 |
| 11682660 | Semiconductor structure | Yuanhao Yu, Chun-Chen Chen | 2023-06-20 |
| 11587783 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2023-02-21 |