Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11649546 | Organic reactants for atomic layer deposition | Eva Tois, Hidemi Suemori, Suvi Haukka | 2023-05-16 |
| 11646194 | Methods for forming silicon nitride thin films | Suvi Haukka, Jaakko Anttila | 2023-05-09 |
| 11587783 | Si precursors for deposition of SiN at low temperatures | Shang Chen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2023-02-21 |