Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11646194 | Methods for forming silicon nitride thin films | Antti Niskanen, Suvi Haukka | 2023-05-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11646194 | Methods for forming silicon nitride thin films | Antti Niskanen, Suvi Haukka | 2023-05-09 |