Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814400 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2023-11-14 |
| 11814715 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Anton Vihervaara, Mikko Ritala, Markku Leskelä | 2023-11-14 |
| 11667595 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Miika Mattinen, Mikko Ritala, Markku Leskelä | 2023-06-06 |
| 11624112 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Tiina McKee, Mikko Ritala, Markku Leskelä | 2023-04-11 |
| 11555242 | Precursors and methods for atomic layer deposition of transition metal oxides | Jaakko Niinisto, Mikko Ritala, Markku Leskelä, Suvi Haukka | 2023-01-17 |
| 11542600 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2023-01-03 |