Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11667595 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2023-06-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11667595 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2023-06-06 |