Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821084 | Atomic layer deposition of rhenium containing thin films | Jani Hamalainen, Mikko Ritala | 2023-11-21 |
| 11814715 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Timo Hatanpää, Anton Vihervaara, Mikko Ritala | 2023-11-14 |
| 11814400 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Timo Hatanpää, Mikko Ritala | 2023-11-14 |
| 11694903 | Area selective organic material removal | Mikko Ritala, Chao Zhang | 2023-07-04 |
| 11667595 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Timo Hatanpää, Miika Mattinen, Mikko Ritala | 2023-06-06 |
| 11643728 | Atomic layer deposition and etching of transition metal dichalcogenide thin films | Jani Hamalainen, Mikko Ritala | 2023-05-09 |
| 11624112 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Tiina McKee, Timo Hatanpää, Mikko Ritala | 2023-04-11 |
| 11555242 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Jaakko Niinisto, Mikko Ritala, Suvi Haukka | 2023-01-17 |
| 11542600 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Timo Hatanpää, Mikko Ritala | 2023-01-03 |