Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821084 | Atomic layer deposition of rhenium containing thin films | Mikko Ritala, Markku Leskelä | 2023-11-21 |
| 11643728 | Atomic layer deposition and etching of transition metal dichalcogenide thin films | Mikko Ritala, Markku Leskelä | 2023-05-09 |