Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798834 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface | Viljami Pore | 2023-10-24 |
| 11735422 | Method of forming a photoresist underlayer and structure including same | Ivan Zyulkov, David Kurt de Roest, Yoann Tomczak, Michael Eugene Givens, Perttu Sippola +3 more | 2023-08-22 |
| 11615980 | Method and apparatus for filling a recess formed within a substrate surface | Viljami Pore | 2023-03-28 |