Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827978 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Bhushan Zope, Shankar Swaminathan, Qi Xie, Giuseppe Alessio Verni | 2023-11-28 |
| 11664222 | Atomic layer deposition of indium gallium zinc oxide | Oreste Madia, Andrea Illiberi, Michael Eugene Givens, Tatiana Ivanova, Varun Sharma | 2023-05-30 |
| 11608557 | Simultaneous selective deposition of two different materials on two different surfaces | Michael Eugene Givens, Eva Tois, Suvi Haukka, Daria Nevstrueva | 2023-03-21 |
| 11574813 | Atomic layer etching | Varun Sharma | 2023-02-07 |