Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827978 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Bhushan Zope, Shankar Swaminathan, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni | 2023-11-28 |
| 11674220 | Method for depositing molybdenum layers using an underlayer | Paul F. Ma, Roghayyeh Lotfi, Jaebeom Lee, Amit Mishra | 2023-06-13 |