Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791153 | Deposition of hafnium oxide within a high aspect ratio hole | Jiyeon Kim, Petri Raisanen, Sol Kim, Ying-Shen Kuo, Michael Schmotzer +1 more | 2023-10-17 |
| 11735420 | Wafer treatment for achieving defect-free self-assembled monolayers | Chang Ke, Lei Zhou, Biao Liu, Cheng Pan, Yuanhong Guo +5 more | 2023-08-22 |
| 11674220 | Method for depositing molybdenum layers using an underlayer | Roghayyeh Lotfi, Jaebeom Lee, Eric Christopher Stevens, Amit Mishra | 2023-06-13 |
| 11587829 | Doping control of metal nitride films | Annamalai Lakshmanan, Ben-Li Sheu, Guodan Wei, Nicole Lundy | 2023-02-21 |