Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11847776 | System using film thickness estimation from machine learning based processing of substrate images | Sivakumar Dhandapani, Dominic J. Benvegnu, Jun Qian, Kiran Shrestha | 2023-12-19 |
| 11836913 | Film thickness estimation from machine learning based processing of substrate images | Sivakumar Dhandapani, Dominic J. Benvegnu, Jun Qian, Kiran Shrestha | 2023-12-05 |