Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823916 | Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning | Wei Lu, Jianshe Tang, Brian J. Brown | 2023-11-21 |
| 11801197 | Treatment methods using handheld devices for disorders | Michael Gertner, Arash Sabet | 2023-10-31 |
| 11780045 | Compensation for substrate doping for in-situ electromagnetic inductive monitoring | Wei Lu, David Maxwell Gage, Harry Q. Lee, Kun Xu | 2023-10-10 |
| 11764069 | Asymmetry correction via variable relative velocity of a wafer | Brian J. Brown, Eric Lau, Ekaterina A. Mikhaylichenko, Jeonghoon Oh, Gerald Alonzo | 2023-09-19 |