Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764069 | Asymmetry correction via variable relative velocity of a wafer | Jimin Zhang, Brian J. Brown, Ekaterina A. Mikhaylichenko, Jeonghoon Oh, Gerald Alonzo | 2023-09-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764069 | Asymmetry correction via variable relative velocity of a wafer | Jimin Zhang, Brian J. Brown, Ekaterina A. Mikhaylichenko, Jeonghoon Oh, Gerald Alonzo | 2023-09-19 |